Spatial light modulator with sub-wavelength structure

ABSTRACT

Additional control flexibilities to generate more gray scales for an image display system is achieved by controlling the intensity distribution of the light projection from a light source to a deflecting mirror to further coordinate with the control of the intermediate states of the deflecting mirror. The control light source intensity distribution can provide incident light with wide varieties of intensity distributions including non-uniform, symmetrical and non-symmetrical, different distributions of polarizations, various cross sectional shapes of the incident lights and other combinations of all of the above variations. More stable and better control of gray scale control is also achieved by optimizing the intensity distributions of the incident light to produce the best visual effects of the image display.

This application is a Non-provisional application of a Provisional Application 60/818,059 filed on Jun. 30, 2006. The Provisional Application 60/818,059 is a Continuation in Part (CIP) application of a pending U.S. patent application Ser. No. 11/121,543 filed on May 4, 2005. The application Ser. No. 11/121,543 is a Continuation in part (CIP) application of three previously filed applications. These three applications are Ser. No. 10/698,620 filed on Nov. 1, 2003, Ser. No. 10/699,140 filed on Nov. 1, 2003, and Ser. No. 10/699,143 filed on Nov. 1, 2003 by one of the Applicants of this patent application. The disclosures made in these patent applications are hereby incorporated by reference in this patent application.

FIELD OF THE INVENTION

This invention relates to image display system. More particularly, this invention relates to display system with a spatial light modulator that includes sub-wavelength microstructure disposed on a flexible deformable surface of micromirrors for enhancing flexibility in the control and display of images.

BACKGROUND OF THE INVENTION

Even though there are significant advances made in recent years on the technologies of implementing electromechanical micromirror devices as spatial light modulator, there are still limitations and difficulties when employed to provide high quality images display. Specifically, when the display images are digitally controlled, the image qualities are adversely affected due to the fact that the image is not displayed with sufficient number of gray scales.

Electromechanical micromirror devices have drawn considerable interest because of their application as spatial light modulators (SLMs). A spatial light modulator requires an array of a relatively large number of micromirror devices. In general, the number of devices required ranges from 60,000 to several million for each SLM. Referring to FIG. 1A for a digital video system 1 disclosed in a relevant U.S. Pat. No. 5,214,420 that includes a display screen 2. A light source 10 is used to generate light energy for ultimate illumination of display screen 2. Light 9 generated is further concentrated and directed toward lens 12 by mirror 11. Lens 12, 13 and 14 form a beam columnator to operative to columnate light 9 into a column of light 8. A spatial light modulator 15 is controlled by a computer 19 through data transmitted over data cable 18 to selectively redirect a portion of the light from path 7 toward lens 5 to display on screen 2. The SLM 15 has a surface 16 that includes an array of switchable reflective elements, e.g., micromirror devices 32, such as elements 17, 27, 37, and 47 as reflective elements attached to a hinge 30 that shown in FIG. 1B. When element 17 is in one position, a portion of the light from path 7 is redirected along path 6 to lens 5 where it is enlarged or spread along path 4 to impinge the display screen 2 so as to form an illuminated pixel 3. When element 17 is in another position, light is not redirected toward display screen 2 and hence pixel 3 would be dark.

The on-and-off states of micromirror control scheme as that implemented in the U.S. Pat. No. 5,214,420 and by most of the conventional display system imposes a limitation on the quality of the display. Specifically, when applying conventional configuration of control circuit has a limitation that the gray scale of conventional system (PWM between ON and OFF states) is limited by the LSB (least significant bit, or the least pulse width). Due to the On-Off states implemented in the conventional systems, there is no way to provide shorter pulse width than LSB. The least brightness, which determines gray scale, is the light reflected during the least pulse width. The limited gray scales lead to degradations of image display.

Specifically, FIG. 1C shows an exemplary circuit diagram of a prior art control circuit for a micromirror according to U.S. Pat. No. 5,285,407. The control circuit includes memory cell 32. Various transistors are referred to as “M*” where * designates a transistor number and each transistor is an insulated gate field effect transistor. Transistors M5, and M7 are p-channel transistors; transistors, M6, M8, and M9 are n-channel transistors. The capacitors, C1 and C2, represent the capacitive loads presented to the memory cell 32. Memory cell 32 includes an access switch transistor M9 and a latch 32 a, based on a static random access switch memory (SRAM) design. All access transistors M9 are arranged in a row and each transistor receives a DATA signal from a different bit-line 31 a. The particular memory cell 32 to be written is accessed by turning on the appropriate row select transistor M9, using the ROW signal functioning as a wordline. Latch 32 a is formed with two cross-coupled inverters, M5/M6 and M7/M8, to operate with two stable states, i.e., state 1 is Node A high and Node B low and state 2 is Node A low and Node B high.

The mirror is driven by a drive electrode abuts a landing electrode formed separately from the drive electrode and is held at a predetermined inclination angle. An elastic “landing chip” is formed at the portion that comes into contact with the landing electrode and assists the operation of deflecting the mirror in the opposite direction when the control is switched. The portion where the landing chip is formed and the landing electrode have the same potential, so that there will be no short circuit through contact.

Each of the mirrors that form such a mirror device has a side length of 4 to 15 μm. The reflected light from the gap between adjacent mirror surfaces unnecessary for image display if not properly managed could potentially reduce the contrast of the modulated images. The mirrors are therefore arranged on a semiconductor wafer substrate in such a way that the gap and light reflected the gap is minimized. One mirror device includes an appropriate number of mirror elements on the substrate as image display elements wherein each mirror element including the mirror. The appropriate number of the image display elements is in compliance with the display resolution defined by VESA (Video Electronics Standards Association) or numbers in compliance with the television broadcast standards. When the mirror device has a plurality of mirror elements, the number of the mirror elements corresponds to a WXGA standard (resolution: 1280 by 768) defined by VESA, and the pitch between the mirrors is 10 μm, the diagonal length of the display area of the mirror is about 0.6 inches, which is small enough to form a compact mirror device.

The dual states switching as illustrated by the control circuit controls the micromirrors to position either at an ON of an OFF angular orientation as that shown in FIG. 1A. The brightness, i.e., the gray scales of display for a digitally control image system is determined by the length of time the micromirror stays at an ON position. The length of time a micromirror is controlled at an ON position is in turned controlled by a multiple bit word. For simplicity of illustration, FIG. 1D shows the “binary time intervals” when control by a four-bit word. As that shown in FIG. 1D, the time durations have relative values of 1, 2, 4, 8 that in turn define the relative brightness for each of the four bits where 1 is for the least significant bit and 8 is for the most significant bit. According to the control mechanism as shown, the minimum controllable differences between gray scales for showing different brightness is a brightness represented by a “least significant bit” that maintaining the micromirror at an ON position. In a simple example, and assuming n bits of gray scales, the frame time is divided into (2n−1) equal time slices. For a 16.7 milliseconds frame period and n-bit intensity values, the time slice is 16.7/(2n−1) milliseconds Having established these times, for each pixel of each frame, pixel intensities are digitally quantified, such that black is 0 time slices, the intensity level represented by the LSB is 1 time slice, and maximum brightness is 15 time slices (in the case of n=4). Each pixel has a digitally quantified intensity that is determined by on time during a frame period. Thus, during a frame period, each pixel with a digitally quantified value of more than 0 is on for the number of time slices that correspond to its intensity. The viewer's eyes integrate the pixel brightness so that the image appears as if the image were generated with analog levels of light.

For addressing deformable mirror devices, PWM calls for the data to be formatted into “bit-planes”, each bit-plane corresponding to a bit weight of the intensity value. Thus, if the intensity of each pixel is represented by n-bit number, each frame of data has n bit-planes. Each bit-plane has a 0 or 1 value for each display element. In the PWM example described in the preceding paragraphs, during a frame, each bit-plane is separately loaded and the display elements are addressed according to their associated bit-plane values. For example, the bit-plane representing the LSBs of each pixel is displayed for 1 time slice.

When adjacent image pixels are shown with great degree of different gray scales due to a very coarse scale of controllable gray scale, artifacts are shown between these adjacent image pixels. That leads to image degradations. The image degradations are specially pronounced in bright areas of display when there are “bigger gaps” of gray scales between adjacent image pixels. It was observed in an image of a female model that there were artifacts shown on the forehead, the sides of the nose and the upper arm. The artifacts are generated due to a technical limitation that the digital controlled display does not provide sufficient gray scales. At the bright spots of display, e.g., the forehead, the sides of the nose and the upper arm, the adjacent pixels are displayed with visible gaps of light intensities.

As the micromirrors are controlled to have a fully on and fully off position, the light intensity is determined by the length of time the micromirror is at the fully on position. In order to increase the number of gray scales of display, the speed of the micromirror must be increased such that the digital control signals can be increased to a higher number of bits. However, when the speed of the micromirrors is increased, a strong hinge is necessary for the micromirror to sustain a required number of operational cycles for a designated lifetime of operation. In order to drive the micromirrors supported on a further strengthened hinge, a higher voltage is required The higher voltage may exceed twenty volts and may even be as high as thirty volts. The micromirrors manufacture by applying the CMOS technologies probably would not be suitable for operation at such higher range of voltages and therefore the DMOS micromirror devices may be required. In order to achieve higher degree of gray scale control, a more complicate manufacturing process and larger device areas are necessary when DMOS micromirror is implemented. Conventional modes of micromirror control are therefore facing a technical challenge that the gray scale accuracy has to be sacrificed for the benefits of smaller and more cost effective micromirror display due to the operational voltage limitations.

There are many patents related to light intensity control. These patents include U.S. Pat. Nos. 5,589,852, 6,232,963, 6,592,227, 6,648,476, and 6,819,064. There are further patents and patent applications related to different shapes of light sources. These patents includes U.S. Pat. Nos. 5,442,414, 6,036,318 and Application 20030147052. The U.S. Pat. No. 6,746,123 discloses special polarized light sources for preventing light loss. However, these patents and patent application do not provide an effective solution to overcome the limitations caused by insufficient gray scales in the digitally controlled image display systems.

Furthermore, there are many patents related to spatial light modulation that includes U.S. Pat. Nos. 2,025,143, 2,682,010, 2,681,423, 4,087,810, 4,292,732, 4,405,209, 4,454,541, 4,592,628, 4,767,192, 4,842,396, 4,907,862, 5,214,420, 5,287,096, 5,506,597, and 5,489,952. However, these inventions have not addressed and provided direct resolutions for a person of ordinary skill in the art to overcome the above-discussed limitations and difficulties.

In view of the above problems, the inventors have disclosed, in US Patent Application 2005/0190429, another method for controlling the deflection angle of the mirror to express gray scales of an image. In this disclosure, by freely oscillating the mirror at its natural frequency, the amount of light provided during the oscillation period can be about 25% to 37% of the amount of exiting light when the mirror is turned ON at all times.

According to the control mechanism disclosed in the above-mentioned patent applications, it is not necessary to drive the mirror at high speed, and it is possible to provide higher gray scales with a low spring constant of the spring member that supports the mirror and hence reduce the driving voltage accordingly. Furthermore, the method for reducing the deflection angle of the mirror to reduce the driving voltage described above is effectively combined.

A projection apparatus using the mirror device described above is broadly categorized into two types: a single-plate projection apparatus that uses only one spatial light modulator to change the frequency of projected light with time for color display, and a multi-plate projection apparatus that uses a plurality of spatial light modulators, allows the spatial light modulators to modulate illumination light having different frequencies at all times and combines the modulated light for color display.

FIG. 1E shows the configuration of a representative single-plate projection apparatus. An illumination optical system 100 includes a light source 120 that produces illumination light 110, a collector lens 130 that converges the illumination light 110, a rod integrator 140, and a second collector lens 150 that focuses the exit plane of the rod integrator onto the device.

The light source 120, the collector lens 130, the rod integrator 140 and the collector lens 150 are disposed in this order along the optical axis of the illumination light 110 that is emitted from the light source 120 and incident on a side of a TIR prism 160. The mirror device 210 and the TIR prism 160 are disposed along the optical axis of a projection optical system 200. The illumination light that passes through the light source optical system 100 and enters the TIR prism is reflected off the total reflection surface of the TIR prism 160 and incident on the mirror device 210 at a predetermined inclination angle. Reflected light 220 reflected off the mirror device 210 at right angles is enlarged and projected on a screen through a projection optical system 230.

There is further provided a wavelength selection filter member 300 that alternately inserts and retracts optical filters that transmit light having respective different frequencies in the light path of the illumination optical system or the projection optical system. The spatial light modulator is configured to modulate the illumination light based on different color data in synchronization with the insertion and retraction of the wavelength selection filters into and from the light path. Alternatively, as shown in FIG. 1F, a several kinds of light sources 400 having respective different colors, instead of providing the wavelength selection filter member, may be provided and turned on in a time-sequential manner.

The single-plate projection apparatus described above provides advantages of a relatively simple configuration of the apparatus and allowing easy adjustment, while having a problem of low light usage efficiency because only light having a specific wavelength from the light emitted from the light source is sequentially used. More seriously, since different colors are displayed in a time-sequential manner, if the speed of switching the colors is not fast enough, so-called color breakup occurs in which a viewer disadvantageously recognizes each of the colors as a color band.

On the other hand, FIG. 1G shows an exemplary multiple-plate optical configuration. In FIG. 1G, the illumination light from a light source 5210 is incident on the total reflection surface of a TIR (Total internal reflection) prism 5311 at a critical angle or greater and guided to a prism for color composition/separation. The TIR prism 5311 separates the light path of the illumination light from the light path of modulated light from a deflective spatial light modulator. The color composition/separation prism includes a first color separation/composition prism 5312 and a first joined prism in which a second color composition prism 5313 is joined with a third color composition prism. The first color separation/composition prism 5312 has a first dichroic film at the exit plane that reflects only red light of the illumination light and transmits other colors. The red illumination light reflected off the first dichroic film is totally reflected off the incidence plane of the first color separation/composition prism 5312 and incident on a first spatial light modulator 5100 at a desired angle of incidence. The modulated light that is reflected off the first spatial light modulator 5100 and enters an ON light path travels in the direction of a normal to the first spatial light modulator 5100, is totally reflected off the incidence plane of the first color separation/composition prism 5312, reflected off the first dichroic film, and enters a projection light path. Blue and green illumination lights that have passed through the first dichroic film enter the second color separation/composition prism 5313. At the joined surface of the second color separation/composition prism 5313 and the third color separation/composition prism is disposed a second dichroic film that reflects only the blue light beam. Therefore, the blue illumination light is separated from the illumination light incident on the second color separation/composition prism 5313 and reflected off the second dichroic film. The reflected blue illumination light is totally reflected off the light incidence plane of the second color separation/composition prism 5313 and incident on a second spatial light modulator 5101. The light modulated at the second spatial light modulator 5101 is reflected off the incidence plane and the second dichroic film and directed to the projection light path. The green light that has passed through the second dichroic film is modulated at a third spatial light modulator 5102 and reflected into the projection light path. The respective color light beams modulated at the first, second and third spatial light modulators 5100, 5101 and 5102 and reflected into the same projection light path pass through the total reflection surface of the TIR prism 5311 and are projected onto a projection surface through a projection lens 5400.

In such a configuration, as compared to the single-plate projection apparatus described above, since each of the primary colors is projected at all times, there will be no visual problem such as the so-called color breakup. Furthermore, effective use of light from the light source provides in principle a bright image. On the other hand, adjustment, for example, alignment of the spatial light modulators corresponding to the respective color light beams, will be complex, disadvantageously resulting in an increased size of the apparatus.

It is therefore desirable to provide a projection apparatus that will not suffer from color breakup using a simple single-plate optical configuration. As a method for eliminating the above problem, for example, it is conceivable to color each micromirror element with a coloring resist was disclosed in U.S. Pat. Nos. 5,168,406, 5,240,818 and 5,452,138.

However, the patented inventions in these patents have further difficulties. Specifically, when the thickness of the coloring resist exceeds certain extremely large thickness such as when the thickness is one to three micrometers thicker than that of the actual mirror and furthermore, when a protective layer is provided on the coloring resist, it is difficult to ensure the flatness of the mirror. In this case, as the thickness and hence the mass of the mirror increases, the natural frequency of the mirror increases accordingly, thus resulting in further difficulty in driving the mirror at high speed.

On the other hand, JP-A-9-101468 discloses a configuration in which a diffraction grating is formed on the mirror. In this case, however, it is necessary to direct diffracted color light beams in the same direction and guide them into a projection lens. The apparatus has a disadvantage due to the complex configuration that leads to higher production costs and further difficulties in control and operations.

The invention has been made in view of the above problems and aims to provide an image projection apparatus having a simple optical configuration that does not suffer from color breakup. The display image projection system of this invention achieves a higher level of display gray scales by providing a sub-wavelength grating (SWG) having a period smaller than the wavelength of light on a mirror so as to form a mirror element that reflects light having a specific wavelength.

SUMMARY OF THE INVENTION

It is one aspect of this invention to take advantage of an ultra-fine processing technology available in recent years used in semiconductor manufacture and micro-machining to fabricate a sub-wavelength grating (SWG) having a pitch between the grating ridges that is smaller than the wavelength of light. The SWG is known to generate a structural color found in scales attached to butterfly wings. Although various optical effects, such as interference, scattering and diffraction, are considered to be involved, a resonance effect selectively generated at a specific wavelength through scattering in the microstructures and multiple reflections in the periodic structure is considered to be one of the causes of the generation of the vivid color.

Another aspect of the present invention is related to a spatial light modulator that includes a resonance reflection filter on the pixel display elements. The spatial light modulator comprises a deformable mirror device, which includes a resonance reflection filter structure formed on the mirror surface so that the mirror can reflect light of prescribed frequency.

Another aspect this invention is related to a projection apparatus that includes a spatial light modulator with a monochromatic light source and at least one spatial light modulator, so that enable display apparatus to display a full-time and full-color image. Preferably, the prescribed frequency is substantially equal to the frequency of the monochromatic light source in order to achieve better efficiency.

These and other objects and advantage of the present invention will no doubt become obvious to those of ordinary skill in the art after having read the following detailed description of the preferred embodiment, which is illustrated in the various drawing figures.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention is described in detail below with reference to the following figures.

FIGS. 1A and 1B are functional block diagram and a top view of a portion of a micromirror array implemented as a spatial light modulator for a digital video display system of a conventional display system disclosed in a prior art patent.

FIG. 1C is a circuit diagram for showing a prior art circuit for controlling a micromirror to position at an ON and OFF states of a spatial light modulator.

FIG. 1D is diagram for showing the binary time intervals for a four bit gray scale.

FIGS. 1E, 1F,and 1G are projection functional block diagrams for showing prior art projection systems.

FIGS. 2A to 2C show a micromirror with sub-wavelength microstructures formed on the surface of the micromirrors of this invention implemented in a spatial light modulator.

FIG. 3A shows a light projection system with a plurality of monochromatic light sources projecting light of different colors.

FIGS. 3B-1 and 3B-2 show different arrangements of the pixels with sub-wavelength microstructure wherein the symbol “W” represents a pixel that the pixel reflects lights of all of colors.

FIG. 3C is a functional block diagram that shows another light projection system implemented with the micromirror device of this invention.

FIGS. 4A and 4B shows the spectrum of conventional light sources.

FIG. 4C shows the laser light source of this invention that enable the projection system to utilize the entire intensity of the light source thus increasing the efficiency of optical energy utilization.

FIG. 5 shows a deformable micromirror supported on a deformable hinge for providing flexibility of control to increase the gray scales of image display.

FIG. 6 shows a reflective microstructure and optical transmissive microstructure implemented on a surface of a micromirror in a spatial light modulator of this invention.

FIGS. 7A and 7B show a manufacturing process of the micromirror device of the invention.

DESCRIPTION OF THE PREFERRED EMBODIMENT

Referring to FIGS. 2A to 2B for a preferred embodiment of this invention that includes a micromirror device with two different of sub-wavelength microstructures disposed on the mirror surface and FIG. 2C shows a side cross sectional view of the micromirror. The micromirror device includes a plurality of deformable micro mirrors to reflect a light projected with a prescribed frequency. For the purpose of increasing the gray scales of the display image, a sub-wavelength microstructure is formed on the mirror surface.

In an exemplary embodiment, the sub-wavelength microstructure is a reflection guided mode resonant grating filter. The micromirror device as shown in FIGS. 2A to 2C may be implemented in a system that has a monochromatic light source. This display system further includes a micromirror device that has a plurality of deformable micromirrors for reflecting a light of the prescribed frequency by the sub-wavelength microstructure disposed on the mirror surface. Furthermore, the prescribed frequency of the light projected to the micromirror is substantially equal to the frequency of the monochromatic light source.

Referring to FIGS. 3A and 3B for a projection display system that includes a plurality of monochromatic light source. The display system further includes a micromirror device that has a plurality of deformable micromirrors to reflect the light of a prescribed frequency by the sub-wavelength microstructure disposed on the mirror surface of the micromirror.

In one embodiment as shown in FIG. 3B-1, each micromirror reflects red, green or blue light. In another embodiment as shown in FIG. 3B-2, each micromirror reflects cyan, magenta or yellow light. The layout of the micromirror might be cross-stitched or grid array. FIG. 3C shows another projection system that includes a light source of multiple frequencies such as a super high-pressure mercury capillary lamps or Xenon lamp.

The micromirror of this invention further has another embodiment to provide additional advantages because the light projection system of this embodiment reflects all of the light from the light source. Referring to FIGS. 4A and 4B for the spectrum projected from the conventional light source wherein only a part of the incident light is reflected by a micromirror device having a sub-wavelength microstructure on the mirror surface. By adapting a laser as a light source and setting the reflective frequency equal to the frequency of the laser, the light is fully used as shown in FIG. 4C wherein the monochromatic light source is a laser source. Alternately, the monochromatic light source may be implemented with a light emitting diode (LED). In another preferred embodiment, the sub-wavelength microstructure is formed as a reflection guided mode resonant grating filter.

FIGS. 5A and 5B show a micromirror implemented in an image projection system as another embodiment of this invention. A vertical hinge is implemented in FIG. 5A wherein the vertical hinge has a width W1 and an edge length of L1, and a horizontal hinge is implemented in FIG. 5B wherein the horizontal hinge has a hinge length L2 and a hinge width W2. The hinge length L2 must be shortened in order to shrink the size of the micromirrors and to reduce the pitch between the micromirrors. The image display system includes a deformable mirror device that is supported and formed on a substrate wherein the mirror surface includes a sub-wavelength microstructure to reflect a light of a prescribed light frequency. The micromirror is supported on a deformable hinge, which supports the mirror surface to change the angle relative to the substrate with the hinge substantially perpendicular to the mirror surface. The display system further includes a control mechanism to actuate the hinge and mirror with the edge length of the mirror from four to eleven micrometers in a preferred embodiment. When the laser is applied as a light source, in order to reduce the effect caused by an etendue problem and to minimize the micromirror array, the pitch between adjacent mirrors is configured to have a length between 4 to 12 micrometers to operate with allowable stress imposed on the hinges and within the limit of resolution.

According to above descriptions and illustrations shown in the drawings, this invention further discloses a spatial light modulator having a plurality of micromirrors each for reflecting image display pixels. Each of the micromirrors includes sub-wavelength microstructure to reflect or transmit a light of a prescribed frequency. In an exemplary embodiment, the sub-wavelength microstructure is a reflection guided mode resonance grating filter. This invention further discloses an image projection system that includes such a spatial light modulator. Furthermore, the image display system further includes a monochromatic light source and a spatial light modulator having a plurality of pixels that includes sub-wavelength microstructure to reflect or transmit the light of the prescribed frequency. The prescribed frequency is substantially equal to the frequency of a monochromatic light source.

In an alternate embodiment, the invention further discloses an image projection display system that includes a plurality of monochromatic light sources and a spatial light modulator having a plurality of micromirrors each comprising a sub-wavelength microstructure to reflect or transmit the light projected from the light sources each projecting a light having a different color from each other. The sub-wavelength microstructure reflects or transmits one of the frequencies of the light emitted from said monochromatic light sources, so that the spatial light modulator can reflect all of the light from said light source.

FIG. 6 shows the sub-wavelength microstructure disposed on the surface of a micromirror that is either a reflection or a transmission guided mode resonant grating filter. Furthermore, the sub-wavelength microstructure as shown in FIG. 6 may be implemented in a projection image display system. The display system may include a monochromatic light source such as a laser light source. Alternately, the light source may be a light emitting diode (LED) light source.

The manufacturing process of the mirror device according to this embodiment will be summarized below.

FIGS. 7A and 7B are a series of side cross sectional views for showing an exemplary manufacturing process of the mirror device according to this embodiment.

In FIG. 7A, step 1, a drive circuit and a wiring pattern (not shown) for driving and controlling the mirrors are formed in a semiconductor wafer substrate 1301.

In the step 2, the addressing electrodes 1302 connected to the drive circuit are formed. Then, the drive circuit formed in the semiconductor wafer substrate 1301 is tested to check for if there are abnormality of the operation of the drive circuit and to assure connection continuity of the addressing electrodes 1302. If no abnormality is detected in the drive circuit and the addressing electrodes 1302 in this step, the process proceeds to the next step.

In the step 3, an insulation layer 1303 is formed on the addressing electrodes 1302. The insulation layer 1303 prevents electrical short circuit during the mirror operation and also prevents the electrodes from being eroded through etching in a subsequent step. The insulation layer 1303 may be composed of insulation materials include Sic, Si₃N₄ and Si.

In the step 4, a first sacrificial layer 1304 is deposited on the semiconductor wafer substrate 1301 covering over the drive circuit and the addressing electrodes 1302. The first sacrificial layer 1304 is used to form mirror surfaces in a subsequent step, with a space provided between each of the mirror surfaces and the semiconductor wafer substrate 1301. In an exemplary embodiment, the first sacrificial layer 1304 comprises a SiO₂ layer. In this embodiment, the thickness of the first sacrificial layer 1304 determines the height of an elastic hinge for supporting the mirror.

In step 5, an etching process is used to remove a part of the first sacrificial layer 1304. The height and the shape of the elastic member as that formed in a subsequent step are determined.

In step 6, the elastic member 1305 including a connection section connected to the semiconductor wafer substrate 1301 is deposited on the semiconductor wafer substrate 1301 and the first sacrificial layer 1304 formed in the step 4. The elastic member 1305 is to function as the elastic hinge that supports the mirror. In an exemplary embodiment, the elastic member 1305 comprises an elastic member composed of silicon, such as Si single crystal, polysilicon and a-Si, metals, such as aluminum and titanium, and alloys of these metals. By adjusting the amount of deposition of the elastic member 1305 in this step, the final thickness of the elastic hinge is determined.

In step 7, a photoresist 1306 is deposited on the structure on the semiconductor wafer substrate 1301 formed in the previous steps.

In step 8, a mask is applied to expose the photoresist 1306, and the elastic member 1305 deposited on the semiconductor wafer substrate 1301 is etched to the desired structure shape. The etching process in this step divides the elastic member 1305 deposited on the semiconductor wafer substrate 1301 in the step 6 into individual elastic hinges corresponding to individual mirrors of mirror elements in the mirror device.

In step 9, a second sacrificial layer 1307 is deposited on the structure on the semiconductor wafer substrate 1301. The composition of the second sacrificial layer 1307 may be the same as that of the first sacrificial layer 1304. For example, the second sacrificial layer may be a SiO₂ layer. The second sacrificial layer 1307 is higher than or up to the elevation of the upper surface of the elastic hinge.

In step 10 shown in FIG. 7B, the photoresist 1306 and the second sacrificial layer 1307 deposited on the semiconductor wafer substrate 1301 are polished until the upper surface of the elastic member 1305 to function as the elastic hinge is exposed.

In step 11, a mirror layer 1308 is deposited and connected to the upper surfaces of the photoresist 1306 and the elastic member 1305. The exemplary materials of the mirror layer 1308 may include aluminum, gold and silver. Furthermore, in order to support the mirror layer 1308 and strengthen the connection to the elastic hinge, and in order to prevent a stopper from adhering to the mirror when the mirror is deflected, the mirror support layer 1309 is made of a material different from that of the mirror. For this reason, the mirror layer and the elastic member are formed with different materials. The exemplary material of the mirror support layer 1309 may include titanium and tungsten.

In step 12, a photoresist (not shown) is coated on the mirror layer 1308. A mask is used to expose the photoresist according to the pattern of a mirror array for etching into individually divided mirrors with the patterned shapes. Since the first sacrificial layer 1304, the photoresist 1306 and the second sacrificial layer 1307 are still present underneath the mirror; no direct external force is applied to the elastic member 1305. In a subsequent process to form the mirror and hinge structure, there is an option to divide the semiconductor wafer substrate 1301 into individual mirror devices. Furthermore, it is advantageous to form a protective layer on the mirror layer 1308 for preventing a reduction in reflectance resulting from a foreign matter attached to the mirror surface or scratches on the mirror layer 1308. By further depositing the protective layer on the mirror layer 1308, there are additional benefits because the protective layer can prevent contamination of the elastic member 1305 due to the attachment of a foreign matter. The protective layer can further prevent the destruction of the elastic member 1305 and attachment of foreign matter to the mirror and generation of scratches when a dicing process is performed to divide the semiconductor wafer substrate 1301 into a plurality of individual mirror devices.

In step 11 or 12, nano-imprinting or other methods is used to form a sub-wavelength grating that has a pitch between the grating ridges smaller than the wavelength of light on the mirror surface. Exemplary method for forming the sub-wavelength grating may include a chemical method as well as nano-imprinting.

The mirror devices on the wafer are divided into individual mirror devices. The dicing step for dividing the semiconductor wafer substrate 1301 into individual mirror devices includes the sub-steps of attaching a UV tape to the backside of the semiconductor substrate. The UV tape loses adhesion upon application of UV light. Then the process proceeds with mounting the entire semiconductor wafer substrate 1301 having the UV tape attached to the backside thereof to a frame of the dicing apparatus. A circular blade of a diamond saw is applied to cut the semiconductor wafer substrate 1301. After the semiconductor wafer substrate is divided into individual mirror devices, the UV tape is stretched to pull the cut mirror devices so as to create gaps between individual mirror devices. Therefore, the individual mirror devices are completely separated from each other. Then, when UV light is applied to the backside of the UV tape attached to the backsides of the completely separated individual mirror devices, the adhesion is lost and hence the mirror devices 1401 easily separate from the UV tape. The dicing step is not limited to the diamond saw cutting described above, but may be performed by other methods, for example, a laser cutting, a high pressure water stream cutting, etching scribe lines using another etchant, and reducing the thickness of the semiconductor wafer substrate after scribe lines are formed.

In FIG. 7B, after the step 12 is completed, in step 13, the first sacrificial layer 1304, the photoresist 1306, the second sacrificial layer 1307 and the protective layer are removed using an appropriate etchant. The mirrors protected by these layers become deflectable. The elastic members 1305 and the mirror layers 1308 are formed on the semiconductor wafer substrate 1301 and are deflected by applying electric signals to the drive circuit and electrodes.

Then, the mirrors undergo an anti-stiction treatment for preventing adherence of the moving portions. Furthermore, the mirror is prevented from contacting the electrode in order to prevent the normal control from being disabled.

Finally, the completed mirror device is encapsulated in a package into a product.

The spatial light modulator manufactured by applying the above-described processes allows for full-time and full-color display. Unlike the conventional SLM that allows only for time division display of individual colors inform the conventional single-plate projection apparatuses. Furthermore, the image display system further provides image display through a simple optical configuration without the color breakup problem.

Although the present invention has been described in terms of the presently preferred embodiment, it is to be understood that such disclosure is not to be interpreted as limiting. Various alternations and modifications will no doubt become apparent to those skilled in the art after reading the above disclosure. Accordingly, it is intended that the appended claims be interpreted as covering all alternations and modifications as fall within the true spirit and scope of the invention. 

1. An image projection device receiving a light from a light source through an illumination optic for projecting to a spatial light modulator having a plurality of deflectable micromirrors wherein said micromirrors further comprising: a sub-wavelength microstructure on a reflective surface of said micromirrors.
 2. The image projection device of claim 1 wherein: said sub-wavelength microstructure further comprising a reflection guided mode resonant grating.
 3. The image projection device of claim 1 further comprising: a semiconductor substrate supporting electrodes and deflectable hinges thereon for supporting said micromirrors and for applying electric signals on said electrodes for driving and deflecting said micromirrors to different inclined angles.
 4. The image projection device of claim 1 wherein: said micromirrors further comprising at least two mirror areas for reflecting lights of two different wavelengths.
 5. The image projection device of claim 1 wherein: said micromirrors further comprising mirror areas for reflecting lights of primary colors.
 6. The image projection device of claim 1 wherein: said micromirrors further comprising mirror areas for reflecting lights of secondary primary colors.
 7. The image projection device of claim 1 wherein: said micromirrors further comprising mirror areas for reflecting lights substantially over an entire range of spectrum projected form a light source.
 8. The image projection device of claim 1 wherein: said micromirrors having a pitch between adjacent mirrors substantially between four to twelve micrometers (4 to 12 μm).
 9. The image projection device of claim 1 further comprising: a semiconductor substrate supporting electrodes and deflectable hinges thereon for supporting said micromirrors and for applying electric signals on said electrodes for driving and deflecting said micromirrors to different inclined angles; and a controller for generating said electric signals for inputting to said electrode to control said micromirrors according to a pulse width modulation (PWM) mode and a freely oscillation mode.
 10. The image projection device of claim 1 further comprising: a semiconductor substrate supporting electrodes and deflectable hinges thereon for supporting said micromirrors and for applying electric signals on said electrodes for driving and deflecting said micromirrors and said hinges wherein said micromirrors having a distance ranging substantially between four to twelve micrometers.
 11. An image projection device receiving a light from a light source through an illumination optic for projecting to a spatial light modulator having a plurality of deflectable micromirrors wherein said deflectable micromirrors further comprising: a sub-wavelength microstructure on a reflective surface of said micromirrors; and said micromirrors further selectively reflecting or transmitting a light of a selected wavelength substantially equal to one of a wavelengths projected from said light source.
 12. The image projection device of claim 10 wherein: said light source further comprising a laser light source projecting lights of at least two different wavelengths.
 13. The image projection device of claim 10 wherein: said light source further comprising a light-emitting diode (LED) light source.
 14. An image projection device receiving a light from a light source through an illumination optic for projecting to a spatial light modulator (SLM) having a plurality of deflectable micromirrors each for displaying a pixel wherein said deflectable micromirrors further comprising: a sub-wavelength microstructure on a reflective surface of said micromirrors; and said micromirrors of said SLM further selectively reflecting or transmitting a light of a selected wavelength substantially equal to one of a wavelengths projected from said light source. 